Excimer lamps, also known as ultraviolet excimer lamps, are a light source that uses dielectric barrier discharge (DBD) technology to excite specific inert gases and generate single-wavelength, high-power ultraviolet light. Compared with traditional low-pressure mercury lamps, excimer lamps have outstanding advantages such as pure and single spectrum, mercury-free, environmentally friendly, instantaneous switching, cold light source characteristics, and high efficiency. The SinABC excimer lamp irradiance meter SinEL is designed for accurate measurement of ultraviolet radiation in typical excimer lamp wavelengths such as 172nm, 185nm, and 222nm. It is suitable for light source performance verification, online monitoring, and process control of semiconductor manufacturing, surface treatment, medical phototherapy, and deep ultraviolet disinfection equipment.
Core Performance
1. Ultra-Wide Dynamic Range
lPower range: 0.01uW/cm² to 1300mW/cm², with automatic unit switching based on light source intensity.
lAchieve testing for both weak and strong light with a single device, suitable for applications involving narrowband, broadband, and large wavelength spans.
2. Industrial-grade precision and speed
lPower/Energy Error: ±5%
l2048 samples per second high-speed sampling + 0.1 second screen refresh, capable of measuring instantaneous pulse light sources.
3. Intelligent Interaction Design
l4.3-inch capacitive touchscreen, automatic shutdown after 3 minutes of inactivity, supports bilingual operation in Chinese and English.
lThe built-in timer provides precise timing, can store up to 30 sets of data, and supports PC software for data reading and report export.
4. Multi-scenario adaptability
lMultiple probes can be adapted to the same host, allowing different light sources to be paired with different light receivers.
lMultiple measurements can be taken, and the two modes (normal mode, uniformity mode) can be switched at will.
Table 1 Host Parameters
Model Series | SinEL |
Power range | 0.01uW/cm² - 1300mW/cm² (units automatically switch based on light source intensity) |
Energy range | 0.01uJ/cm²~999999999.99 mJ/cm² |
Unit of power | uW/cm², mW/cm², W/cm², W/m² (can be switched automatically/manually) |
Range variation | 1 billion |
Power/Energy Error | ±5% |
Resolution | 0.01 |
Temperature measurement range | -55℃~125℃ |
Temperature error | ±0.5℃ |
Response speed | 2048 times per second |
Screen refresh rate | 0.1 second |
Operation Method | Touch screen |
Screen display | 4.3-inch capacitive touchscreen |
Battery | 3200mAh lithium battery, providing approximately 12 hours of continuous usage. |
Automatic shutdown | Automatic shutdown after 3 minutes of no response or operation (does not apply when charging). |
Operation prompt sound | Available / Can be closed |
Usage Environment | -20℃ to 60℃, humidity less than 85%, no condensation |
Language | Traditional Chinese, English |
Size | Main unit :146mm*87mm*35mm(L*W*H ) |
Mode Selection | Normal mode, uniformity mode |
Communication Methods | USB |
Optional Accessories | Computer monitoring software |
Table 2 Probe Parameters
Dimensions | Circular, diameter φ38mm, thickness 14mm |
Aperture | Φ4mm |
Cable Specifications | The standard length is 1 meter (customization for longer lengths is available). |
Operating temperature range | -20℃ to 120℃ (wide temperature compensation ensures measurement stability in extreme environments) |
Enclosure Material | Aircraft-grade aluminum alloy, surface anodized, resistant to UV aging. |
Table 3 Probe Model Table
Model | Wavelength range | Application Scenarios |
EL172 | 165-340nm (λ:172nm) | Surface Cleaning and Modification: 172nm high-energy photons directly break down organic contaminants on the material surface, enhancing the adhesion and yield of components such as wafers and liquid crystal panels. |
EL185 | 165-340nm (λ:185nm) | Surface Cleaning and Modification: 185nm high-energy photons directly break down organic contaminants on the material surface, enhancing the adhesion and yield of components such as wafers and liquid crystal panels. |
EL222 | 165-340nm (λ:222nm) | Human-machinecoexistencesterilization: 222nm wavelength can effectively inactivate bacteria and viruses. Due to its extremely shallow penetration depth, it poses significantly less potential harm to human skin and eyes compared to traditional 254nm ultraviolet light, making it suitable for disinfection in dynamic spaces where people are present. |
Serial Number | Product Name | Quantity | Note |
1 | Instrument host | 1 |
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2 | Inductive probe | 1 | Optional |
3 | USB charging cable | 1 |
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4 | Instruction Manual | 1 |
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5 | Certificate of Conformity | 1 |
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6 | Warranty Card | 1 |
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7 | portable case | 1 |
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8 | Computer monitoring software | 1 | Optional |